Research results presented at the Symposium on VLSI Technology, June 12-15, 2012, comprise a broad spectrum of VLSI technology topics, including new concepts and breakthroughs in VLSI materials, processes, devices, interconnects, and packaging up to 3D-system integration. Beyond advanced theories, fundamentals, characterization, analysis, modeling, and reliability for VLSI devices, heterogeneous integration of non-Si materials/devices on large Si substrates and new functional devices beyond CMOS with a path for VLSI implementation will be discussed.